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Equipment Front End Module (EFEM)
Industry type:Productivity and energy
Product model number:EFEM320系列
award 2

1.HIWIN EFEM - MIT, ballscrew, guideway, robot reducer, single axis, wafer robot, drive, servo & direct drive motor, EFEM critical parts made by HIWIN.
2.Automation of semiconductor, AOI, solar & LED. High speed, accuracy and reliability. HIWIN module design meets market needs & industrie 4.0.
3.HIWIN Module design, provides flexiblity for customization, up to eight optional wafer load/out ports, better than market two wafer load/out ports. Good quality & short lead time.
4.Provide cost-saving solutions at 20% to 40% benefit to meet key indicators- cost per wafer and cost of ownership.
5.EFEM detects wafer cassette position by sensors, controls accuracy at micron level, less than 1/10 of a human hair difference.
6.EFEM complies with SEMI S2, cleanliness level 1 & ROHS. Detect abnormalities, activate safety protection for person and equipment.
7.EFEM core technology is software. GUI design, allows remote commands, integrates subsystems by simple single command.


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HIWIN Technologies Corp. is the world leading brand of motion control and system manufacturer. With its core technologies, HIWIN focuses on creating innovative products with high speed, high precision, eco-friendly, and energy-saving.
Our products, from components to sub system and system, include Ballscrew, Guideway, Bearing, Robot Reducer, Industrial/Medical Robot, Torque Motor Rotary Table. HIWIN products are widely applied in various industries, including Automation, Semi-Conductor, Electronics, Medical, Precision Machine, Transportation, and more.
With the commitment of being the “Best Partner in Smart Manufacturing”, we leverage HIWIN’s advantages of integrated solutions in mechatronic products and global service to deliver added value to customers. HIWIN dedicate to actively promote ESG practices for sustainability. In addition to enhance our own competitiveness by continuous innovations, HIWIN also aims to drive the transformation and upgrading of the Machinery Industry.


HIWIN Technologies, started 1989 with own brand “HIWIN” and innovative research to market world widely. HIWIN derived from HI-tech WINner. With HIWIN, customers become hi-tech winners. CIS color - Green as harmony and earth. Represent natural, eco-friendly, and grow. Red as heat of the earth's core. Represent sincere, positivity, innovation. Through perseverance, HIWIN became well-known overseas. After receiving global acknowledge, HIWIN, as a Taiwan Brand, finally won the domestic recognition. HIWIN is now the world leading brand in motion control and system with 14 subsidiaries, R&D centers, labs and over 300 distributors around the world. HIWIN believes “Manufacturing is not a purpose, it is a means to satisfy human needs.” With this spirit, company continues to innovate. Nikkei Business 2017 “ASIA 300 Market Growth”, HIWIN ranked No.1! HIWIN being the No. 1 among the Asia listed companies is an honor for Taiwan. It proves branding is difficult but rewarding.