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Thermal AMC Unit Gen.2.0
Industry type:Productivity and energy
Product model number:TAU-EU
award 3

In the semiconductor and panel photolithography processing equipment, the highest concentration of VOCs is generated by coating, vacuum drying, soft baking, and hard baking equipment. This product can replace traditional VOCs treatment techniques such as condensation, adsorption, and washing methods to remove VOC emissions from the photolithography process. It achieves a long-lasting and low-pollution VOC removal method, reducing the environmental impact of VOCs and effectively improving process yield.
1. Removal efficiency >80-90%
2. Precise temperature and humidity control: temperature ±0.5°C, humidity ±2%RH
3. Reduction of 202 tons of carbon emissions per year per unit.
4. WCF water catalyst:
It utilizes a water catalyst to convert VOCs and ion adsorption plates to capture ionized VOCs, achieving a long-lasting method of VOC removal using water.
5. Water-washing filtration device:
By utilizing parallel convection between liquid and gas, it reduces water usage.


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CHD TECH provides the best environment for the world's most advanced processes, and assists corporations and countries to achieve a carbon balance.
1. Introduction: CHD TECH was founded in 2003, mainly providing mini-environment control equipment and energy-saving services for semiconductor industries. We won 31 awards such as National Award of Outstanding SMEs, and some of them are received from the president.
Major customers include global semiconductor fabrication plants, advanced IC packaging and testing plants and global IC equipment suppliers.
2. Process equipment business group: We are the largest semiconductor mini-environment control equipment manufacturer in Taiwan and China, with a temp. precision of ±0.01℃, and capabilities to monitor and remove AMC.
3. Energy saving business group: With nearly 20 years of energy-saving experience, we have saved clients 1 million on power cost. We also reduce CO2 emission, equals to the carbon sink capacity of 688 Taan Parks.


The brand name is "CHYI DING", "CHYI" means special, unexpected and beautiful; "DING" means grand and treasure, which symbolize our commitment to develop the perfect craft of clean air. The brand of CHD contains four advanced technical dimensions: Total solution of cleaning air, Mini-Environment Control, Chemical Contamination Detection and Energy Saving Service. We pursue precision and stability of implements, making the perfect craft of clean air and offering the high-customized service with prominent controlling ability for customers and focus-market.