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LED Coater System
Industry type：Productivity and energy
Product model number：ATOM 6500C
Advanced System Technology Co., Ltd.
AST's ATOM 6500C is used in the 4/6”wafer photoresist coating process. When compared with conventional wafer tracks, the ATOM 6500C is unique with the innovative design elements listed below:
1. It is equipped with a "Reduced Resist Coating" technique, which reduces the minimum PR volume down to 0.65 CC and usage by up to 50%.
2. The brand-new, in-house handling robot is faster, cheaper, easier to maintain and more convenient to have its performance upgraded.
3. In the standard production mode, it produces 30% more than competitors.
4. The robot is equipped with its unique 3rd fork dedicated to transferring wafers into the coating module so that no heat accumulation can impact wafer temperature and therefore further improves the coating uniformity.
5. It has one more cassette station than competitors which improves efficiency and productivity and further lowers the risk of material shortage of production.
6. In-house software allows AST to quickly provide customized services.
About Advanced System Technology Co., Ltd.
Advanced System Technology Co., Ltd., was established in 2002. AST specializes in high-precision electrode beam evaporator, high-density Plasma Reactive Ion Etching and photoresist spin coater/developer. We provide system development, production, sales and services to the customer in LED, power device, and semiconductor frontend manufacturing.
AST is located in Hsinchu Industrial Park in Hsinchu county, where it is 10km from the Hsinchu Science Park.
AST’s vision is to build its own premier brand and become a world class semiconductor system provider. Our strategy is to combine worldwide semiconductor, automation, process application, and other elite teams in various fields, as well as establish strategic alliances with ITRI, NCTU, and NTHU to enhance R&D capabilities.
AST is mainly owned by Hermes-Epitek Co., Ltd., which is the largest semiconductor service provider in Greater China with sales and service bases all over China, Taiwan, Singapore and Malaysia.
AST’s vision is to build its own premier brand in the semiconductor industry by providing customers with reliable high quality equipment in LED and semiconductor manufacturing. Our guiding principles are providing equipment that fulfill customer process requirements while reducing costs and adhering to the highest quality control standards. Semiconductor manufacturing equipment is extremely complicated. As the technology moves forward, it is often expensive and time-consuming for foreign suppliers to make improvements to meet the customer’s requirements and satisfaction. Therefore AST is dedicated to develop and produce equipment, combined with Taiwan’s strong industrial infrastructure support and our strong belief in “customer first”, that provides the most superior process equipment integration and better operation efficiency for users.
