Equipment Front End Module (EFEM)
1.HIWIN EFEM - MIT, ballscrew, guideway, robot reducer, single axis, wafer robot, drive, servo & direct drive motor, EFEM critical parts made by HIWIN.
2.Automation of semiconductor, AOI, solar & LED. High speed, accuracy and reliability. HIWIN module design meets market needs & industrie 4.0.
3.HIWIN Module design, provides flexiblity for customization, up to eight optional wafer load/out ports, better than market two wafer load/out ports. Good quality & short lead time.
4.Provide cost-saving solutions at 20% to 40% benefit to meet key indicators- cost per wafer and cost of ownership.
5.EFEM detects wafer cassette position by sensors, controls accuracy at micron level, less than 1/10 of a human hair difference.
6.EFEM complies with SEMI S2, cleanliness level 1 & ROHS. Detect abnormalities, activate safety protection for person and equipment.
7.EFEM core technology is software. GUI design, allows remote commands, integrates subsystems by simple single command.

Award winning products

In order to deliver the best user experience, please rotate your screen to portrait mode.